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Research Article

JCR. 2020; 7(3): 733-736

Fabrication of Nano-Scale Ultra Sharp Atomic Force Microscopy (AFM) Tips

Mr. Himanshu Yadav, Ms. Meenakshi Sharma.

Atomic force microscope (AFM) gives high resolution surface imaging by scanning a sharp
nanotip over a surface while controlling the interaction force between Atomic force microscopy (AFM) tip and
the surface. The quality of surface imaging is depending on sharpness of the AFM probe. There are Different
types of Micro/Nanofabrication technologies for atomic force microscopy (AFM) probes have been
demonstrated, emphasizing the fabrication of versatile tip shapes. In this paper we will discuss about
Micro/Nanofabrication technique to get high aspect ratio Atomic force microscopy (AFM) probes. The tips with
well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and
the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in
the fabrication process. To demonstrate the innovation potential of this method, three different probe designs
were fabricated: a plane passive AFM probe, a probe with integrated electrostatic actuator, and a probe which
allows scanning on vertical sidewalls. The performance of the fabricated tips has been demonstrated by
scanning test structures in an atomic force microscope

Key words: Nanotip, Cantilever, Atomic force microscopy, Nanofabrication, High Aspect Ratio, AFM probes

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